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For
Research & ME/EE 585/685 Students
I.
Cleanroom Safety Documents
Microfabrication
Facilities Instructions (Saravana Pitchaikani). Instructions.
Safety
Training Material (Mike Frank + SDSU EHS). PPT
File.
II.
Microfabrication Procedures
Organic
MEMS (C-MEMS) Lithography Procedures (Phoebe Shin & Michael
Frank) (Description)
OLED (Green
Pholed) Preparation Procedure (by Mohammad Majzoub & Pablo
Martin-Ramos) (Description)
Negative
Photolithography using SU-8 (by Berhanu K. Wondimu and Mohammad
Majzoub) (Description)
Positive
Photolithography (by Namratha Tata & Vinot Kumar Vijayaraghavan)
(Description)
Mask Preparation
using AutoCAD (template file)
Mask Preparation
using CoventorWare (sample
- HW for EE/ME 685)
PDMS Mold
Preparation Procedures (by Mike Frank) (Description)
Multi-layer
Litho & Mask Alignment for Ag/SU-8 Blend (by Gunay Ozturk) (Description)
III.
Misc.
Link
for CoventorWare 2010 Download (SDSU License Only). CoventorWare
2010.
Yahoo
eGroups for SDSU MEMS Research Group - 
Cleanroom
& MEMS Lab Supplies
Inventory.
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