MEMS Design and
Application, Course No: ME/EE-685
|(Spring 2004) – San Diego State University - San Diego, CA|
Micro-electro-mechanical systems, or MEMS, is an emerging area with applications to a variety of engineering fields such as aerospace, mechanical, electrical, communications and bioengineering. This course concentrates in discussing the process, manufacturing (fab), materials, design, layout and simulation issues in MEMS. The course work is complemented with a comprehensive group design project and a review paper of a MEMS technology of the student’s choice. The course contents is prepared for a diverse student body of mechanical, electrical and bioengineering graduate students.
The objectives of this course are:
This is a graduate level course open to aerospace, electrical, mechanical and bioengineering students.
Visits to Local Fabs and Companies:
Layout and Simulation Software:
For this MEMS design class, we will make extensive use of the CoventorWare Suite of MEMS software. We have a license for 15 simultaneous users. The software is installed on all the Dell GX110 machines in Room 221 (Computing Lab) in Engineering Building. CoventorWare will be used for homework layout problems and the final design project.
MEMS Lab (Cleanroom)
For some of the soft lithography and microfluidics projects, we will consider using UCI's INRF cleanroom.
All lecture materials, articles, homeworks, and class announcements are available on SDSU's Blackboard Web Portal.
Stephen D. Senturia, Microsystem Design , Kluwer 2000, ISBN 0-7923-7246-8.
Grading and Assignments:
Design Project - 40%
Dr. Kassegne is a visiting scientist in Mechanical Engineering at the Henri Samueli School of Engineering of UC Irvine where he conducts research in the areas of microarrays, microfluidics, sensors and actuators for applications in the life sciences and next generation lithography. He has taught several courses in FEA, computational modeling, mechanical design, and MEMS and has over ten years of industrial experience.
samk at digitaladdis at com
Shown above are some pictures from Design Project presentations and tour of the Class 1000 Cleanroom & Anechoic Chamber (RF Lab) at UCI's Integrated Nanosystem's Research Facility (INRF).
Highlights of ME685 Group Projects: