MEMS-Specific Software & Simulation Capabilities

  1. CoventorWare – Layout, Process Editing, 3D Modeling and Multi-physics Simulation
  2. COMSOL – Multi-Physics Simulation.
  3. SolidWorks – 3D Modeling.

We have wide experience in modeling the following MEMS and Microfluidics devices:

BioMEMS

  1. DNA chips
  2. 3D separation and manipulation chambers
  3. Electrokinetics including electrochemistry
  4. 3D microfluidics (Navier-Stokes, Nernst Planck, Convection and diffusion, etc.)
  5. Heat Transfer

Inertial Sensors

  1. Accelerometers
  2. Gyroscopes

RF MEMS

  1. Switches
  2. Resonators