MEMS-Specific Software & Simulation Capabilities

1. CoventorWare – Layout, Process Editing, 3D Modeling and Multi-physics Simulation
2. COMSOL – Multi-Physics Simulation.
3. SolidWorks – 3D Modeling.

We have wide experience in modeling the following MEMS and Microfluidics devices:

BioMEMS

1. DNA chips
2. 3D separation and manipulation chambers
3. Electrokinetics including electrochemistry
4. 3D microfluidics (Navier-Stokes, Nernst Planck, Convection and diffusion, etc.)
5. Heat Transfer

Inertial Sensors

1. Accelerometers
2. Gyroscopes

RF MEMS

1. Switches
2. Resonators