Microfabrication Procedures
  1. Organic MEMS (C-MEMS) Lithography Procedures (Phoebe Shin & Michael Frank)(Description)
  2. OLED (Green Pholed) Preparation Procedure (by Mohammad Majzoub & Pablo Martin-Ramos) (Description)
  3. Organic PV Cells Preparation Procedure (by Ashish Gaikwad) (Description)
  4. Negative Photolithography using SU-8 (by Berhanu K. Wondimu and Mohammad Majzoub)(Description)
  5. Negative Photolithography using SU-8 for feature spacings < 100um (by Ashish Gaikwad and Mihir Parikh) (Description)
  6. Positive Photolithography (by Namratha Tata & Vinot Kumar Vijayaraghavan) (Description)
  7. Mask Preparation using AutoCAD (template file)
  8. Mask Preparation using CoventorWare (sample – HW for EE/ME 685)
  9. PDMS Mold Preparation Procedures (by Mike Frank) (Description)
  10. Multi-layer Litho & Mask Alignment for Ag/SU-8 Blend (by Gunay Ozturk) (Description)
Cleanroom Certification Program

Required Reading on Procedures

  1. Introduction. Link
  2. Positive Lithography. Link
  3. Negative Lithography. Link
  4. Metal Lift-off. Link
  5. Plasma & CF4 Dry Etching. Link
  6. Equipment List. Link
  7. Examination. Link
  8. Score-Sheet. Link
  9. Sample Exam. Link

MEMS Lab Handbook, Cleanroom Guidelines, Etiquettes, and Safety Documents

  1. MEMS Research Lab Handbook. Prepared by Sebastian Shaner.
  2. MEMS Research Lab Mask Layout Design Checklist.
  3. Cleanroom Basic Guidelines (Pieter van Niekerk). Video.
  4. Lab Guidelines and Etiquette. Link.
  5. Microfabrication Facilities Instructions (Saravana Pitchaikani). Instructions.
  6. Safety Training Material (Mike Frank + SDSU EHS). PPT File.

More Fab Procedures – Proprietary
  1. Aluminium Etching
  2. Thick Film Photoresist
  3. Image ReversalPhotoresist
  4. Photosensitive Polyimide Precursor
  5. Negative Resist NR9-1000P
  6. Procedure to establish OFF-process
  7. HD-4100 Series
  8. Initial Carbon Gandalf Protocol
  9. HD 4100
  10. Gandalf Gen I (1mm, 1mm spacing pillar) protocol
  11. Negative Resist NR9-3000P
  12. Futurrex NR9-3000PY Lift-Off Photoresist
  13. PISCES Fabrication
  14. Polyimide Device Protocols
  15. Positive Metal Lift Off
  16. Training in Handling Hazardous Materials
  17. Photodefineable Polyimide Processing
  18. POLYIMIDE HD4100 Process (Maria Vomero)
  19. Pyrolysis Protocol (MTI’s Split Tube Furnace)
PhD and MS Documents
  1. Procedure for MS students
  2. Procedure for PhD students
  3. Declaration of Academic Honesty and Integrity. Link
  4. Thesis Data & Publication Authorship Form. Link
  5. Link for CoventorWare 2010 Download (SDSU License Only). CoventorWare 2010.
  6.  SDSU MEMS Research Group
  7. Cleanroom & MEMS Lab Supplies Inventory. (Updated 2016)