Capabilities

UV-Lithography

SVGL/ASML Micrascan III Step and Scan Deep UV Litho Station (Q1-09)

Cymer EX5700 Deep UV Laser System

OAI UV Light Source

Mask Aligner

Acid Etching

Oxidation Growth

Spin-coating

Sputter Coating (through EMF)

Vacuum Oven

Wire Bonding

Contact us:

You may contact the current cleanroom manager Mohammad Majzoub at mymmzouba at hotmail dot com or Berhanu Kebede at berhanu_kw at yahoo dot com.

Shown are: views from main entrance, undergrad and grad students doing lithography, main steel frame under construction, and in-house CFD Model for HVAC optimization.