Kassegne
MEMS Research Group
Department of Mechanical Engineering
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SDSU
CLEANROOM
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Capabilities UV-Lithography SVGL/ASML Micrascan III Step and Scan Deep UV Litho Station. Cymer EX5700 Deep UV Laser System OAI UV Light Source Mask Aligner Acid Etching Oxidation Growth Spin-coating Sputter Coating (through EMF) Vacuum Oven Wire Bonding
Contact us: You may contact the current cleanroom manager Mohammad Majzoub at mymmzouba at hotmail dot com or Berhanu Kebede at berhanu_kw at yahoo dot com.
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Shown are: views from main entrance, undergrad and grad students doing lithography, main steel frame under construction, and in-house CFD Model for HVAC optimization.
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The Micrascan III Step and Scan Deep UV Litho Station combines the elements of both steppers and scanners into Micrascan's "step and scan" technology. Step and scan combines the advantages of scanning projection aligners and steppers by scanning only a portion of the wafer, then stepping to another portion of the wafer and repeating the process as needed.
[Download FE Pgms] [FEA Projects] [Q&A-Computational Mechanics] [Conferences]
Copyright SK 2010.