Kassegne MEMS Research Group
Department of Mechanical Engineering 
College of Engineering
San Diego State University
San Diego, CA 92182

[Home] [Research] [Recent Publications] [Grad Students] [Teaching] [MEMS Lab][MEMS Software] [Picture Galleries] [Bio]

MEMS Lab Equipments for Soft Lithography & Microfabrication

1.       Photoresist Spinner  - Headway Research Model EC101DT-R790

2.       UV Light Source - Model LS 30/5 350W NUV

3.       Wet Bench/Hood - 881C SEMIFAB WET BENCH MODEL #WPS-400

4.       Signal Generator (Wavetek 75) - LCR Meter ( Boonton 5110) and Power Supply (HP 6236A Triple Output)

5.       CCD Camera & Stereo Microscope System -  Includes WS2182000 Wesco WS8 stereo body, WS2183050, 129920, 183020, 120024, 180092, 180094, 120156 parts, and ZC Zarveco USB 2.0 HRC Digital Camera with VTB-Fl-01 Focus Lock.

6.       Peristaltic Micropumps - Model RP-1 PERISTALTIC PUMP 4-CHANNEL  (Model 7103-054)

7.       Tubing & Connectors, Mixing Valves, and Fitting

8.       Misc. Microfluidic Equipments

a)       Handheld Conductivity Meters - Fisher Scientific Model 30 SCT.

b)       Digital Hot Plate – Cole Parmer Instrument Company, Model  EW-84301-40

c)       Thermocouple Thermometer – Cole Parmer Instrument Model 91100-50.

9.       Vacuum Bake Ovens - Model 3606-1CE,  Barnstead International

10.     Signatone Probe Station with CCD camera and 19" monitor.

11.     Mask Aligner - Newport Corp.

12.     EZ Frequency Counter

[Download FE Pgms] [FEA Projects] [Q&A-Computational Mechanics] [Conferences]

Copyright SK 1999-2007.